ULVAC RG202R Residual gas analyzer
SOLD OUT sold
etc469





Measurement Range:2 to 200amu,
Resolution(M/deltaM):1M(10%P.H.),
Sensitivity(A/Pa):5E-3,
Minimum detection partial pressure(Pa):10E-11,
Maximum working pressure(Pa):1E-2,
Filament:Ir/Y2O3,
Emission Current(nA):0.5,
Amplitude Range(A f.s.):1E-5 to 1E-12,
Detector:Secondary electron multiplier type,

Control Unit;
PC Inter Face:RS-232C,/RS485,
Output Connector:Analog Input(0 to 10V),
Partial pressure set point output*2,,Total pressure set point output*1,Inter lock,
Utility:DC24V,2A,

Differencial Exhaust system;
Maximum Sampling Pressure(kPa):1.3,
Ultimate pressure(Pa):5E-6,

Maker Price:JPY2,160,000

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